Preparation of AlSb Thin Films by Co-sputtering and Its Character Research

Al and Sb thin films were prepared by co-sputtering with Al and Sb targets and annealed in order to obtain AlSb thin films. The structural and chemical valence properties of the thin films were studied by XRD and AES. The results show that AlSb is cube structure and preferred orientation along the（111） crystal direction. There are Al, C, Sb and O elements in the surface of AlSb films. Al element shows electronegativity; Sb element shows electronegativity in the films.