不同磁控溅射工艺对SLM成型Inconel 718合金性能的影响

    Effects of Different Magnetron Sputtering Processes on Properties of SLM-processed Inconel 718 Alloy

    • 摘要: 通过利用不同氮气流量的等离子体增强磁控溅射技术在SLM成型Inconel 718基体上沉积CrNx薄膜,利用XRD、SEM、纳米压痕仪、摩擦磨损仪和电化学工作站等技术表征试样的物相组成、截面形貌、力学性能及在3.5%NaCl溶液中的耐蚀性能。讨论不同磁控溅射工艺对SLM成型Inconel 718合金表面力学性能和耐蚀性能的影响,为SLM成型零部件表面的性能改善提供工艺参考。结果表明:经55 mL/min氮气流量处理后,试样的表面硬度为20.50GPa,弹性模量为292.30 GPa,磨损量为4.69×10-4 mm3,摩擦系数为0.12。与未处理试样相比,高氮气流量处理后试样展现出优良的力学性能和耐磨性能。在3.5wt%NaCl溶液中,经40 m L/min氮气处理的试样腐蚀电位为-23.8 mV,经55mL/min氮气处理的试样腐蚀电位为-32.8 mV,均高于未处理试样低的腐蚀电位为-411.5 mV。利用不同氮气流量可显著改善SLM制备Inconel 718合金的表面性能,更好满足服役性能要求。

       

      Abstract: CrNx thin films were deposited on SLM formed Inconel 718 substrate by plasma enhanced magnetron sputtering with different nitrogen flow rates. The phase composition, cross-sectional morphology, mechanical properties and corrosion resistance in 3.5% NaCl solution of the samples were characterized by XRD, SEM, nanoindenter, friction and wear tester and electrochemical workstation. The effects of different magnetron sputtering processes on the surface mechanical properties and corrosion resistance of SLM formed Inconel 718 alloy were mainly discussed to provide a process reference for improving the surface performance of parts prepared by SLM technology. The results show that after 55 mL/min nitrogen flow treatment, the surface hardness of the sample is 20.50 GPa, the elastic modulus is 292.30 GPa, the wear loss is 4.69×10-4mm3,and the friction coefficient is 0.12. Compared with the untreated sample, the sample after high nitrogen flow treatment exhibits excellent mechanical properties and wear resistance. In 3.5 wt% NaCl solution, the corrosion potential of the sample treated with 40 mL/min nitrogen flow rate is -23.8 m V, and that of the sample treated with 55 mL/min nitrogen flow rate is -32.8 mV, both are higher than-411.5 mV of the untreated sample. The surface properties of SLM formed Inconel 718 alloy can be significantly improved by using different nitrogen flow rates, which can better meet the requirements of service performance.

       

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