直流电微弧氧化法制备钛酸盐系铁电薄膜的研究
Study on Titanate Ferroelectric Thin Film Deposited by DC Power Micro-arc Oxidation
吴才香, 李文芳, 黄文波, 陈单明
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作者单位：(华南理工大学 材料科学与工程学院, 广东 广州 510640)
中文关键字：铁电薄膜； 制备技术； Ti； BaTiO3
英文关键字：ferroelectric thin film; deposition; titanate; BaTiO3
中文摘要：利用自制的微弧氧化装置, 选用合适的电解液及工艺参数，在Ti基体上直接沉积钛酸盐系铁电薄膜。利用X射线、扫描电镜对薄膜的相组成、形貌进行了分析。结果表明，在本实验条件下，在Pb(CH3COO)2及BaCl2溶液中无法沉积出PbTiO3及BaTiO3，在Ba(CH3COO)2及Ba(OH)2溶液中成功沉积出BaTiO3薄膜；形貌分析表明，BaTiO3晶粒呈鳞片状，薄膜表面散布着许多微孔。
英文摘要：With an in-house built device and under specific technical parameters, titanate ferroelectric thin films were deposited directly on the surface of Ti plate in certain electrolyte by micro-arc oxidation(MAO). The phase composition and morphology were investigated by XRD and SEM. The results show that BaTiO3 thin film is deposited successfully in either Ba(CH3COO)2 or Ba(OH)2 solution, whereas PbTiO3 and BaTiO3 does not appear respectively in Pb(CH3COO)2 and BaCl2 solution, under the experimental conditions. The morphologies of BaTiO3 films show that BaTiO3 grains are squama-shaped and the films are scattered with pinholes.